High reliability, durability, and quality are at the core of our generators. We pursue high performance and controllability with simple operational units.  Using advanced technology, we have developed RF Generators that have the best balance and consistent output for plasma excitation. With our broad knowledge about the specific needs in RF applications, and our keen engineering know-how, we offer only state-of-the-art RF Power Technology.  Our goal is to improve performance, and to establish reliability and productivity for our customers.  Our generators can be applied to many purposes other than semiconductor industries, such as research and development of new materials, for example.

One of our flagship products is RP-5000-60M.  This generator has successfully been used for the manufacturing of semiconductor equipment and in processes like Dry-Etching, Sputtering for super conducting, and Ion Implanting. Some of the benefits of using our generators are:     

 　 ◘1/3 the Size of our Conventional Generator

Compared to our conventional generators, latest generators are one-third the size, providing more space efficiency.

　  ◘Wide Frequency Range

Even with the small size, our generators are capable of producing frequencies of 400 kHz to 500 MHz.  The range varies from rated RF Power output of 100 W to 10 kW, used for experimental laboratory and/or semiconductor equipment manufacturing.

　  ◘Special Model: Simultaneous Excitation

For Simultaneous Excitation, we can provide dual frequency generators that are more cost and space efficient. This aspect also maximizes future process development capabilities.

　 ◘Special Model: Pulse Modulation

Pulse modulation enables process development with new parameters such as pulse duty and frequency, as opposed to the use of CW (Continuous Wave).

     ◘Accessories

 We can meet all other needs related to Trap Filters for Dual Frequency Generators, RF Noise Cut Filters for Thermo Couples, Super Current Heaters, and Phase Shifters.